[20p-W621-1~7] Gas Flow Analysis in Vacuum and Low-Pressure Processing

[20p-W621-5] Rarefied gas flow and Plasma simulations by particle models

〇Takao Wada¹, Kazuhiro Sahashi¹, Akemi Shioya¹ (1.Wave Front Co., Ltd.)

Keywords:numerical simulation,Rarefied gas flow,Plasma

The features of the commercial simulation software and the application of that in the makers are presented . The simulation examples of Particle-PLUS and DSMC-Neutrals, which are developed in our company, are explained. DSMC-Neutrals and Particle-PLUS adopt DSMC (Dicrect Simulation Monte Calro) method and PIC (Particle in Cell) method, respectively.