Crystallinity Evaluations of Pr+Ce oxide Films Deposited by RF Sputtering

Presentation information

Oral presentation

6 Thin Films and Surfaces » 6.4 Thin films and New materials

Mon. Mar 21, 2016 9:00 AM - 11:45 AM H103 (H)

9:15 AM - 9:30 AM

〇Kenta Kumagai¹, Kota Yamaguchi¹, Junichiro Takahata¹, Setsu Suzuki², Keiji Ishibashi², Yasuhiro Yamamoto¹ (1.Hosei Univ., 2.Comet Inc.)

Keywords:sputtering,Praseodymium,Cerium