The 63rd JSAP Spring Meeting, 2016

Presentation information

Oral presentation

6 Thin Films and Surfaces » 6.4 Thin films and New materials

[21a-H103-1~10] 6.4 Thin films and New materials

Mon. Mar 21, 2016 9:00 AM - 11:45 AM H103 (H)

Motofumi Suzuki(Kyoto Univ)

9:15 AM - 9:30 AM

[21a-H103-2] Crystallinity Evaluations of Pr+Ce oxide Films Deposited by RF Sputtering

Kenta Kumagai1, Kota Yamaguchi1, Junichiro Takahata1, Setsu Suzuki2, Keiji Ishibashi2, Yasuhiro Yamamoto1 (1.Hosei Univ., 2.Comet Inc.)

Keywords:sputtering,Praseodymium,Cerium