[21a-H103-1~10] 6.4 Thin films and New materials

[21a-H103-4] Annealing time dependence of fixed charges in Sr₂SiO₄ thin films prepared from a target Sr₂SiO₄ by PLD

〇Shota Taniwaki¹, Keiji Imanishi¹, Mitsuhiro Umano¹, Haruhiko Yoshida¹, Koji Arafune¹, Shin-ichi Satoh¹, Yasushi Hotta¹ (1.Univ. of hyogo)

Keywords:Sr-silicate,PLD,Field effect passivation