[21a-H103-1~10] 6.4 Thin films and New materials

△ [21a-H103-5] Solid-phase crystallization of amorphous molybdenum oxide thin films via post-annealing under uniaxial compression

〇Ryotaro Nanba¹, Yasuhisa Nozawa¹, Geng Tan¹, Nobuo Tsuchimine², Satoru Kaneko^3,1, Akifumi Matsuda¹, Mamoru Yoshimoto¹ (1.Tokyo Tech., 2.TOSHIMA Manu. Co., Ltd, 3.Kanagawa Ind. Tech. Center)

Keywords:Molybdenum Oxide,Solid Phase Crystallization,Thermal Nanoimprint