The 63rd JSAP Spring Meeting, 2016

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6 Thin Films and Surfaces » 6.4 Thin films and New materials

[21p-H103-1~21] 6.4 Thin films and New materials

Mon. Mar 21, 2016 1:15 PM - 7:00 PM H103 (H)

Tamio Endo(Gifu Univ.), Kyoko Namura(Kyoto Univ.), Tomoko Nagata(Nihon Univ)

4:00 PM - 4:15 PM

[21p-H103-11] Commercial-Prober-Compatible Probe for Non-Destructive Electric Contact

〇Michiko Yoshitake1, Shinjiro Yagyu1, Toyohiro Chikyow1 (1.NIMS)

Keywords:ultra thin film,non-destructive,electric measurement

A contact probe, which enables robust electric contact without damaging specimens is developed. The strucure for connecting this probe to commercially available prober is developed.