5:45 PM - 6:00 PM
[21p-H137-18] Dependence of the working distance and the applied bias on the surface potential distribution of insulating specimen irradiated by electron beam
Keywords:SEM,EB
Presentation information
Oral presentation
7 Beam Technology and Nanofabrication » 7.2 Applications and technologies of electron beams
[21p-H137-1~22] 7.2 Applications and technologies of electron beams
Mon. Mar 21, 2016 1:15 PM - 7:00 PM H137 (H)
Yoichiro Neo(Shizuoka Univ.), Hitoshi Nakahara(Nagoya Univ.), Yasuhito Gotoh(Kyoto Univ.)