The 63rd JSAP Spring Meeting, 2016

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7 Beam Technology and Nanofabrication » 7.2 Applications and technologies of electron beams

[21p-H137-1~22] 7.2 Applications and technologies of electron beams

Mon. Mar 21, 2016 1:15 PM - 7:00 PM H137 (H)

Yoichiro Neo(Shizuoka Univ.), Hitoshi Nakahara(Nagoya Univ.), Yasuhito Gotoh(Kyoto Univ.)

6:00 PM - 6:15 PM

[21p-H137-19] Measurement of fogging electron current in Scanning Electron Microscope

〇(M1)TAKU NODA1,2, Yoshifumi Hagiwara1, Masatoshi Kotera1, Raynald Gauvin2 (1.Osaka Inst., 2.McGill Univ.)

Keywords:SEM,Electron Beam