3:15 PM - 3:30 PM
[21p-H137-9] Development of electrostatic Cs-corrector using annular and circular electrodes (ACE corrector)(3)
Keywords:Cs corrector,Electron microscope,Chromatic aberration
The spherical-aberration-corrector for high-resolution electron microscopes has been newly designed and constructed. This aberration correction device is formed by an electrostatic lens consisted of only two electrodes having annular and circular holes and a constant-voltage supply. We call it “ACE (Annular and Circular Electrodes) corrector”. The ACE corrector has big advantages in easy alignment and very low-cost over the conventional Cs-correctors. In this study, we have investigated behaviors of the spherical and chromatic aberrations in the proposed device by numerical calculations.