The 63rd JSAP Spring Meeting, 2016

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15 Crystal Engineering » 15.8 Crystal evaluation, impurities and crystal defects

[21p-P11-1~11] 15.8 Crystal evaluation, impurities and crystal defects

Mon. Mar 21, 2016 1:30 PM - 3:30 PM P11 (Gymnasium)

1:30 PM - 3:30 PM

[21p-P11-5] First principles calculation on stability of gettering sites induced by C3H5 cluster ion implantations

Sho Shirasawa1, 〇Kouji Sueoka1 (1.Okayama Pref. Univ.)

Keywords:gettering,C3H5 cluster ion implantation,silicon