[21p-P17-1~26] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

△ [21p-P17-1] Evaluation of pH Sensors using Self-Aligned Four-Terminal Metal Double-Gate CLC LT Poly-Si TFTs on Glass Substrate

〇Hiroki Ohsawa¹, Michihiro Nakano¹, Hitoshi Suzuki¹, Satoko Kuwano¹, Akito Hara¹ (1.Tohoku Gakuin Univ.)

Keywords:TFT,poly-Si,pH sensor

We evaluated pH sensors using self-aligned four-terminal metal double-gate CLC LT Poly-Si TFTs in which threshold voltage control is possible. A pH sensitivity of 21.7 mV/pH which was close to the theoretical value was obtained and it was confirmed that the TFT worked as a pH sensor.