〇Yongxun Liu¹, Sommawan Khumpuang^1,2, Masayoshi Nagao¹, Hara Shiro^1,2 (1.AIST, 2.MINIMAL)

〇Kazuhiro Koga^1,2, Fumito Imura^1,2, Yuji Kitayama², Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.AIST, 2.MINIMAL)

〇Fumito Imura^1,2, Kazuhiro Koga^1,2, Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.AIST, 2.Minimal Fab)

〇Noriko Miura¹, Takeshi Yamada^1,2, Takeshi Aizawa^1,2, Shinichi Ikeda^1,3, Yuuki Ishida^1,3, Takanori Mikahara^1,3, Hiroshi Nishizato^1,4, Norio Umeyama^1,3, Yasuhiro Onishi^1,2, Sommawan Khumpuang^1,3, Shiro Hara^1,3 (1.MINIMAL, 2.YONEKURA, 3.AIST, 4.HORIBA STEC)

〇kazushige sato¹, Haruki Toonoe¹, Takashi Chiba^1,3, Masao Terada^1,3, Shinichi Ikeda^1,2, Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.Minimal Fab Development Association, 2.AIST, 3.Sakaguchi E.H VOC Corp)

〇kazushige sato¹, Haruki Toonoe¹, Takashi Chiba^1,3, Masao Terada^1,3, Shinichi Ikeda^1,2, Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.Minimal Fab Development Association, 2.AIST, 3.Sakaguchi E.H VOC Corp)

〇Norio Umeyama^1,2, Kazuhiro Koga^1,2, Fumito Imura^1,2, Kazutaka Shibuya³, Takayuki Fuse³, Yoshio Nakamura³, Kouichiro Ichikawa³, Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.AIST, 2.MINIMAL, 3.Fujikoshi Machinery)

〇NING LI¹, HITOSHI HABUKA¹, TAKANORI MIKAHARA², SHIN-ICHI IKEDA^2,3, YUUKI ISHIDA^2,3, SHIRO HARA^2,3 (1.Yokohama National Univ., 2.MINIMAL, 3.AIST)

〇Takanori Mikahara^1,2, Noriko Miura¹, Yuuki Ishida², Takahiro Ito³, Shinichi Ikeda², Hitoshi Habuka⁴, Sommawan Khumpuang², Shiro Hara² (1.MINIMAL, 2.AIST, 3.ORIENTAL MOTOR, 4.Yokohama N Univ)

〇Yuuji Kitayama¹, Nobuo Takeda³, Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.MINIMAL, 2.AIST, 3.DNK)

〇Hiroyuki Tanaka^1,2, Hisato Ogiso^1,2, Shizuka Nakano^1,2, Toshiyasu Hayami^2,3, Toshiya Miyazaki^2,3, Ryoichi Irita^2,4, Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.AIST, 2.MINIMAL, 3.SPPT, 4.PMT)

〇HARUKI TONOE¹, Yoshiaki Matsuhashi^1,2, Minoru Kamitomai^1,2, Kazuhiro Sato^1,2, Sommawan Khumpuang^1,3, Shiro Hara^1,3 (1.MINIMAL, 2.KURODA, 3.AIST)

〇naoko tajima^1,2, Kenjiro Iida^1,2, Kensei Ehara¹, Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.AIST, 2.MINIMAL)

〇Masato Mitsudome¹, Hiroaki Honma^1,2, Shintaro Itoh³, Makoto Ishida¹, Kazuaki Sawada¹, Kazuhiro Takahashi¹ (1.Toyohashi Tech. Univ., 2.JSPS Research Fellow DC2, 3.Nagoya Univ.)

〇(M1)TAKUYA KITANO¹, TAKUYA ITO¹, HIROAKI SUZUKI¹, TATSUO ISHIJIMA¹, YASUNORI TANAKA¹, YOSHIHIKO UESHUGI¹, SOMMAWAN KHUMPUANG², SHIRO HARA² (1.Kanazawa Univ., 2.AIST)

〇Kohei NITTA¹, Ryo TAKIGAWA¹, Akihiro IKEDA¹, Mitsuaki KUMAZAWA², Toshiharu HIRAI², Michiro KOMATSU², Tanemasa ASANO¹ (1.Kyushu Univ., 2.JGC C&C)

〇Taiji Nishikawa¹, Satoshi Yamauchi¹ (1.Ibaraki Univ.)

〇Ryutaro Suda¹, Mamiko Yagi¹, Akira Kojima¹, Jun-ichi Shirakashi¹, Nobuyoshi Koshida¹ (1.Tokyo Univ. of Agri. & Technol.)

〇(M1)HITOSHI UTSUNO¹, Osamu Sugiura² (1.Chiba Inst. of Tech., graduate school of eng., 2.Chiba Inst. of Tech., fac. of eng.)

〇(B)Shunsuke Oba¹, Shuichiro Hashimoto¹, Kohei Takei¹, Jing Sun¹, Xu Zhang¹, Taiyu Xu¹, Shuhei Asada¹, Toshihiro Usuda¹, Kiyoshi Endo¹, Motohiro Tomita^1,2,3, Hiroki Tokutake³, Ryosuke Imai³, Atsushi Ogura³, Takashi Matsukawa⁴, Meishoku Masahara⁴, Takanobu Watanabe¹ (1.Waseda Univ., 2.JSPS PD, 3.Meiji Univ., 4.AIST)

〇(M2)Mengyi Chen¹, Yasushi Masahiro², Shun-ichiro Ohmi¹ (1.Tokyo Tech, 2.Tanaka Kikinzoku)

〇(M1)Tomoki Tateyama¹, Yuta Nagatomi¹, Shintaro Tanaka¹, Keisuke Yamamoto², Dong Wang¹, Hiroshi Nakashima² (1.I-EggS, Kyushu Univ., 2.KASTEC, Kyushu Univ.)

〇Tomonori Nishimura¹, Takeaki Yajima¹, Akira Toriumi¹ (1.The Univ. of Tokyo)

〇Akihiro Suzuki¹, Osamu Nakatsuka¹, Mitsuo Sakashita¹, Shigeaki Zaima^1,2 (1.Grad. Sc. of Eng., Nagoya Univ., 2.IMaSS, Nagoya Univ.)

〇Naoya Okada^1,2, Noriyuki Uchida², Toshihiko Kanayama² (1.JST-PRESTO, 2.AIST)

〇Norio Ishitsuka¹, Noriyuki Sakuma¹ (1.HItachi R&D Group)

〇(M2)WATARU OSAWA¹, Toshiaki Tsuchiya¹ (1.Shimane Univ.)

En-Tzu Lee¹, 〇Shuichi Noda¹, Wataru Mizubayashi², Kazuhiko Endo², Seiji Samukawa^1,2 (1.Tohoku Univ., 2.AIST)

〇Yukinori Morita¹, Tatsuro Maeda¹, Hiroyuki Ota¹, Wataru Mizubayashi¹, Shn-ichi O'uchi¹, Meishoku Masahara¹, Takashi Matsukawa¹, Kazuhiko Endo¹ (1.AIST)

〇Kenji Inaba¹, Emi Sato¹, Manami Sato¹, Yukiko Obara¹, Yukie Ishizawa¹, Masayuki Miyano¹, Ryuji Miura¹, Patrick Bonnaud¹, Ai Suzuki¹, Naoto Miyamoto¹, Nozomu Hatakeyama¹, Masanori Hariyama¹, Akira Miyamoto¹ (1.Tohoku Univ.)

〇SEIYA TANIKAWA¹, HISASHI KINO², TAKAFUMI FUKUSHIMA¹, TETSU TANAKA^1,3 (1.Dept. Bioengineering and Robotics, Tohoku Univ., 2.FRIS, Tohoku Univ., 3.Dept. of Biomedical Engineering, Tohoku Univ.)

〇(M1)Kenichi Nakadozono¹, Keiichiro Iwanabe¹, Yousuke Senda¹, Tanemasa Asano¹ (1.Kyushu Univ.)

〇(B)Shogo Nakata¹, Kenichiro Kanao¹, Shingo Harada¹, Takayuki Arie¹, Seiji Akita¹, Kuniharu Takei¹ (1.Osaka Pref Univ.)

〇Kazuyoshi Ono¹, Alexander Yu^1,2, Norio Sato³, Yujiro Tanaka¹, Tomomi Sakata³, Yoshito Jin^1,3, Hiroshi Koizumi¹ (1.NTT Device Technology Labs., 2.Georgia Institute of Tech, 3.NTT Device Innovation Center)

〇Masato Suzuki¹, Takashi Moriyama¹, Hashiguchi Gen¹ (1.Shizuoka Univ.)

〇(M2)Aoi Takahashi¹, Keigo Enya², Kanae Haze², Paul Bierden³, Steven Cornelissen³, Charlie Lam³, Michael Feinberg³ (1.SOKENDAI, 2.JAXA/ISAS, 3.BMC)

〇(M1)Yoshiyuki Okada¹, kentaro kawai¹, kenta arima¹, mizuho morita¹ (1.Osaka Univ.)

〇Takashi Sasaki¹, Tomohiro Suzuki¹, Hiroshi Matsuura², Kazuhiro Hane¹ (1.Tohoku Univ., 2.Tohoku Gakuin Univ.)

〇Zhengli Han¹, Takuya Takahashi¹, Hiroshi Toshiyoshi¹ (1.The Univ. of Tokyo)

〇Masahiro Koyama¹, Hiroshi Oka¹, Takashi Amamoto¹, Kohei Tominaga¹, Shogo Tanaka¹, Takuji Hosoi¹, Takayoshi Shimura¹, Heiji Watanabe¹ (1.Osaka Univ.)

〇Hiromu Harada², Nakatani Taichi¹, Shin Ryota¹, Higashi Seiichiro¹ (1.AdSM, 2.Hiroshima Univ.)

〇Yuya Nishimura¹, Takuya Nakashima¹, Makoto Mori¹, Akito Hara¹ (1.Tohoku Gakuin Univ.)

〇Ryosuke Nakashima¹, Hiroaki Hanahusa², Seiichiro Higashi² (1.Hiroshima Univ., 2.Adsm)

〇Susumu Horita¹, Lien Mai¹ (1.Jap. Adv. Inst. Sci. & Tech.)

〇(M2)Yoshiaki Nieda¹, Nobuo Sasaki², Daisuke Hishitani¹, Masahiro Horita³, Yasuaki Ishikawa¹, Yukiharu Uraoka¹ (1.Nara Inst. of Sci. and Tech., 2.Japan Women's Univ., 3.Kyoto Univ.)

〇Taisei Harada¹, Futa Gakiya¹, Takuya Ashitomi¹, Tatsuya Okada¹, Takashi Noguchi¹, Kanji Noda², Akira Suwa^2,3, Hiroshi Ikenoue³, Tetsuo Okuyama⁴ (1.Univ. of the Ryukyus, 2.GiGAPHOTON Inc., 3.Kyusyu Univ., 4.TOYOBO Co.Ltd)

〇Taisei Harada¹, Takuya Ashitomi¹, Tatsuya Okada¹, Takashi Noguchi¹, Nshikata Osamu², Atsushi Oota² (1.Univ. of the Ryukyus, 2.ULVAC Inc.)

〇Tianxi Yang¹, Huang Wei¹, Jin Suzuki¹, Tatsuya Okada¹, Takashi Noguchi¹, Naoya Kawamoto² (1.Univ. of the Ryukyus, 2.Yamaguchi Univ.)

〇Tatsuya Okada¹, Yusuke Shizu¹, Takashi Noguchi¹ (1.Univ. Ryukyus)

〇YI CHEN¹, Tatsuya Okada¹, Takashi Noguchi¹, Fulvio MAZZAMUTO², Karim HUET² (1.Univ. of the Ryukyus, 2.SCREEN Semiconductor Solutions Co., Ltd)

〇Kosuke Ota¹, Shunsuke Kimura¹, Masahiko Hasumi¹, Toshiyuki Sameshima¹, Ayuta Suzuki², Mitsuru Ushijima² (1.TUAT, 2.TEL)

〇Hideaki Tanimura¹, Hikaru Kawarazaki¹, Yukio Ono¹, Takahiro Yamada¹, Shinichi Kato¹, Takayuki Aoyama¹, Ippei Kobayashi¹ (1.SCREEN Semiconductor Solutions)

〇(P)Chi Liu¹, Hiroki Ikegaya¹, Tomonori Nishimura¹, Akira Toriumi¹ (1.Univ. of Tokyo)

〇ryo yokogawa¹, Kazuya Takahashi², Katsuhiko Komori², Yoshihiro Hirota³, Naomi Sawamoto¹, Atsushi Ogura¹ (1.Meiji Univ., 2.Tokyo Electron Tohoku Ltd., 3.Tokyo Electron Ltd.)

〇Ryutatsu Mizukami¹, Akitoshi Nakagawa², Kazuki Hiramatsu², Shinji Takeshima², Tomonori Yamashita¹, Seiichiro Higashi² (1.Hiroshima Univ., 2.Adsm.)

〇Hiroki Ikegaya¹, Tomonori Nishimura¹, Takeaki Yajima¹, Akira Toriumi¹ (1.The Univ. of Tokyo)

〇Hikaru Moriyama¹, Wenchang Yeh¹ (1.Shimane Univ.)

〇(P)ThiCamTu Huynh¹, Koichi Koyama¹, Shigeki Terashima¹, Hideki Matsumura¹ (1.JAIST)

〇Hiroki Ohsawa¹, Michihiro Nakano¹, Hitoshi Suzuki¹, Satoko Kuwano¹, Akito Hara¹ (1.Tohoku Gakuin Univ.)

〇Shota Nibe¹, Akito Hara¹ (1.Tohoku Gakuin Univ.)

〇Mitsuhisa Hiraiwa¹, Tatsuaki Hirata¹, NguyenThi Thuy¹, Koji Kotani², Shin-Ichiro Kuroki¹ (1.Hiroshima Univ., 2.Touhoku Univ)

〇Tatsuaki Hirata¹, Nguyen Thuy¹, Hiraiwa Mituhisa¹, Kotani Kouji², Kikkawa Takamaro¹, Kuroki Shin-ichirou¹ (1.Hiroshima Univ. RNBS, 2.Tohoku Univ.)

〇(M2)Yuuki Yajima¹, Kentaro Sawano¹ (1.TokyoCityUniversity)

〇(PC)Shintaro Otsuka¹, Takahiro Mori¹, Yukinori Morita¹, Noriyuki Uchida¹, Yongxun Liu¹, Shinichi O'uchi¹, Hiroshi Fuketa¹, Shinji Migita¹, Meisyoku Masahara¹, Takashi Matsukawa¹ (1.AIST)

〇Masahiro Koike^1,2, Koji Usuda^1,2, Yoshiki Kamata^1,2, Mori Takahiro^2,3, Tatsuro Maeda^2,3, Tsutomu Tezuka^1,2 (1.Toshiba Corp., 2.GNC, AIST, 3.AIST)

〇kazuki kamimura¹, hiroki nakaie¹, tetsuji arai¹, chiaya yamamoto¹, keisuke arimoto¹, junji yamanaka¹, kiyokazu nakagawa¹, toshiyuki takamatsu² (1.Univ. of Yamanashi, 2.SST Inc.)

〇Katsuya Furuna¹, Jianbo Liang¹, Moeko Matsubara², Yoshitaka Nishio², Naoteru Shigekawa¹ (1.Osaka City Univ., 2.Toyo Aluminium K.K.)

〇Hiroyuki Koide¹, Hao Wang¹, Daisuke Ando¹, Yuji Sutou¹, Junichi Koike¹ (1.Tohoku Univ.)

〇HIDEKI HIRANO¹, KOUSUKE HIKICHI², SHUJI TANAKA¹ (1.Tohoku Univ., 2.Technofine)

〇Naoya Watanabe¹, Masahiro Aoyagi¹, Tsubasa Bandoh², Takahiko Mitsui², Eiichi Yamamoto² (1.AIST, 2.Okamoto Machine Tool Works)

〇Takafumi Kuboyama¹, Yousuke Takagawa¹, Ogawa Shimpei², Fujisawa Daisuke², Kimata Masafumi¹ (1.Ritsumeikan Univ., 2.Mitsubishi Electric Corp.)

〇Takafumi Kuboyama¹, Yousuke Takagawa¹, Shinpei Ogawa², Daisuke Fujisawa², Sinichi Yasui², Masafumi Kimata¹ (1.Ritsumeikan Univ/, 2.Mitsubishi Electric Corp.)

Masataka Goto¹, Etsuo Maeda¹, 〇Reo Kometani¹ (1.Univ. of Tokyo)

Makie Terazawa¹, Momoko Karita¹, Shinya Kumagai¹, 〇Minoru Sasaki¹ (1.Toyota Technol. Inst.)

〇Toshifumi Konishi¹, Daisuke Yamane^2,4, Teruaki Safu¹, Hiroshi Toshiyoshi^3,4, Masato Sone^2,4, Kazuya Masu^2,4, Katsuyuki Machida^1,2,4 (1.NTT-AT, 2.Tokyo Tech., 3.Univ. of Tokyo, 4.JST-CREST)

〇Daisuke Yamane^1,4, Toshifumi Konishi², Hiroyuki Ito^1,4, Hiroshi Toshiyoshi^3,4, Kazuya Masu^1,4, Katsuyuki Machida^1,2,4 (1.Tokyo Tech., 2.NTT-AT, 3.The Univ. of Tokyo, 4.JST-CREST)

〇Minami Teranishi^1,2, Tso-Fu Mark Chang^1,2, Chun-Yi Chen^1,2, Toshifumi Konishi³, Katsuyuki Machida^1,2,3, Hiroshi Toshiyoshi^2,4, Daisuke Yamane^1,2, Kazuya Masu^1,2, Masato Sone^1,2 (1.Tokyo Institute of Technology, 2.JST-CREST, 3.NTT AT Corp., 4.The University of Tokyo)

〇(D)Haochun Tang¹, Chun-Yi Chen^1,2, Tso-Fu Mark Chang^1,2, Katsuyuki Machida^1,2,3, Daisuke Yamane^1,2, Kazuya Masu^1,2, Masato Sone^1,2 (1.P&I Lab. Tokyo Tech, 2.CREST JST, 3.NTT AT Corp.)

〇Yota Ishizuka^1,2, Sari Yanagida^1,2, Tso-Fu Mark Chang^1,2, Chun-Yi Chen^1,2, Toshihumi Konishi³, Katsuyuki Machida^1,2,3, Hiroshi Toshiyoshi^1,4, Daisuke Yamane^1,2, Kazuya Masu^1,2, Masato Sone^1,2 (1.Tokyo Inst., 2.JST-CREST, 3.NTT AT, 4.Tokyo Univ.)

〇BoLun Zheng¹, Takashi Nagoshi^1,2, Tso-Fu Mark Chang¹, Hideki Hosoda¹, Tatsuo Sato¹, Masato Sone¹ (1.Tokyo Tech., 2.AIST)

〇Keisuke Asano^1,2, Hao-Chun Tang^1,2, Chun-Yi Chen^1,2, Tso-Fu Mark Chang^1,2, Daisuke Yamane^1,2, Katsuyuki Machida^1,2,3, Kazuya Masu^1,2, Masato Sone^1,2 (1.CREST, 2.Titech, 3.NTTAT)

〇(M1)Sari Yanagida^1,2, Akiyoshi Araki¹, Tso-Fu Mark Chang^1,2, Chun-Yi Chen^1,2, Takashi Nagoshi³, Equo Kobayashi¹, Hideki Hosoda¹, Tatsuo Sato¹, Masato Sone^1,2 (1.Tokyo Tech, 2.CREST, 3.AIST)

〇Masaharu Yoshiba^1,2, Chun-Yi Chen^1,2, Tso-Fu Mark Chang^1,2, Daisuke Yamane^1,2, Katsuyuki Machida^1,2,3, Kazuya Masu^1,2, Masato Sone^1,2 (1.CREST, 2.P and I Lab,Titech, 3.NTTAT)

〇Akihira Miyachi¹, Makoto Matsunoshita¹, Ryoko Kishikawa^2,3, Satoshi Yoshida⁴, Makoto Kasu⁵, Masahiro Horibe³, Kenjiro Nishikawa⁴, Iwamuro Mitsunori⁶, Shigeo Kawasaki^1,2 (1.ISAS,JAXA, 2.Sokendai, 3.AIST, 4.Kagosima Univ, 5.Saga Univ, 6.Hitachi Chem. Co.,Ltd.)