[20a-S423-1~9] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[20a-S423-4] Nonlinear Oscillation for an Electrostatic MEMS energy harvester (1)

〇Kazuyoshi Ono¹, Alexander Yu^1,2, Norio Sato³, Yujiro Tanaka¹, Tomomi Sakata³, Yoshito Jin^1,3, Hiroshi Koizumi¹ (1.NTT Device Technology Labs., 2.Georgia Institute of Tech, 3.NTT Device Innovation Center)

Keywords:energy harvesting

This paper describes a demonstration of nonlinear oscillation in a millimeter-sized electrostatic vibrational energy harvester for the future Internet of Things. To attain nonlinearity in the microelectromechanical- system (MEMS) device, a gold spring, which has a lower value of Young’s modulus than conventional materials, is adopted as a component of the MEMS structure. The nonlinear oscillation for the millimeter-sized energy harvester was confirmed experimentally by applying external AC voltage.