4:00 PM - 4:15 PM
[20p-S423-10] Calculation of Temperature Distribution in Si Films on Polyimide
Keywords:Blue Multi-Laser Diode Annealing
Presentation information
Oral presentation
13 Semiconductors » 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology
[20p-S423-1~19] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology
Sun. Mar 20, 2016 1:45 PM - 6:45 PM S423 (S4)
Seiichiro Higashi(Hiroshima Univ.), Akito Hara(Tohoku Gakuin Univ.)