Yongxun Liu

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Speaker, Author, Co-Author

Sat. Mar 19, 2016 9:00 AM - 12:30 PM S423 (S4)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[19a-S423-1~13] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

9:00 AM - 9:15 AM

[19a-S423-1] Fabrication and Characterization of SOI-CMOS Integrated Circuits by Minimal Fab and Mega Fab Hybrid Process

〇Yongxun Liu¹, Sommawan Khumpuang^1,2, Masayoshi Nagao¹, Hara Shiro^1,2 (1.AIST, 2.MINIMAL)

Sun. Mar 20, 2016 9:00 AM - 12:15 PM S422 (S4)

Oral presentation
| 13 Semiconductors
| 13.5 Semiconductor devices and related technologies

[20a-S422-1~12] 13.5 Semiconductor devices and related technologies

10:00 AM - 10:15 AM

[20a-S422-5] Fabrication and Characterization of Vt Tunable Triangular Channel FinFETs

〇Yongxun Liu¹, Takashi Matsukawa¹, Kazuhiko Endo¹, Shinichi Ouchi¹, Junichi Tsukada¹, Yuki Ishikawa¹, Wataru Mizubayashi¹, Yukinori Morita¹, Shinji Migita¹, Hiroyuki Ota¹, Meishoku Masahara¹ (1.AIST)

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