[21p-P17-1~26] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

△ [21p-P17-22] Study of Grain Boundary on Mechanical Properties of Aluminum Alloy Investigated by Micro Compression Test

〇BoLun Zheng¹, Takashi Nagoshi^1,2, Tso-Fu Mark Chang¹, Hideki Hosoda¹, Tatsuo Sato¹, Masato Sone¹ (1.Tokyo Tech., 2.AIST)

Keywords:Bi-crystal,Micro Compression,Aluminum