TAKUYA KITANO

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Speaker, Author, Co-Author

Mon. Mar 21, 2016 9:00 AM - 12:00 PM W611 (W6)

Oral presentation
| 8 Plasma Electronics
| 8.1 Plasma production and control

[21a-W611-1~11] 8.1 Plasma production and control

11:45 AM - 12:00 PM

△ [21a-W611-11] Investigation of Pulse Modulation Effect in Microwave Excited Bubble Plasma

〇(M1)TAKUYA KITANO¹, TAKUYA ITO¹, HIROAKI SUZUKI¹, TATSUO ISHIJIMA¹, YASUNORI TANAKA¹, YOSHIHIKO UESUGI¹ (1.Kanazawa Univ.)

Sat. Mar 19, 2016 1:45 PM - 6:15 PM S423 (S4)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[19p-S423-1~17] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

2:00 PM - 2:15 PM

[19p-S423-2] Development of Water Plasma Asher Equipment for Minimal FAB.

〇(M1)TAKUYA KITANO¹, TAKUYA ITO¹, HIROAKI SUZUKI¹, TATSUO ISHIJIMA¹, YASUNORI TANAKA¹, YOSHIHIKO UESHUGI¹, SOMMAWAN KHUMPUANG², SHIRO HARA² (1.Kanazawa Univ., 2.AIST)

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