[21p-P17-1~26] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[21p-P17-17] A Study on the Robustness of Multi-layer Metal Stopper for MEMS Accelerometer

〇Toshifumi Konishi¹, Daisuke Yamane^2,4, Teruaki Safu¹, Hiroshi Toshiyoshi^3,4, Masato Sone^2,4, Kazuya Masu^2,4, Katsuyuki Machida^1,2,4 (1.NTT-AT, 2.Tokyo Tech., 3.Univ. of Tokyo, 4.JST-CREST)

Keywords:MEMS Accelerometer,Stopper,Robustness