[21p-P3-1~21] 6.2 Carbon-based thin films

[21p-P3-7] The Growth of Polycrystalline Diamond on DLC coated Silicon substrate with Microwave Plasma-enhanced Chemical Vapor Deposition

〇Tomohiro Shinagawa¹, Takeo Furuhata¹, Hiroya Yamarin¹, Keisuke Nakamura¹, Hideaki Yamada², Mikio Yamamuka¹ (1.Mitsubishi Electric Corp., 2.AIST)

Keywords:diamond,plasma enhanced chemical vapor deposition