[21p-S222-1~9] Advanced Fabrication System for Metal Oixde Thin Films

[21p-S222-4] Latest trend of sputtering technologies in Germany

〇Koichi Suzuki¹ (1.SFT)

Keywords:Pulsed sputtering,Fraunhofer FEP,Fraunhofer IST

As the latest trend of sputtering technologies of Fraunhofer FEP and IST, which are known with the development of advanced PVD technologies, RM cathode for precision optics/low temperature/low damage coating, high power square wave pulsed power supply, spectroscopic process control system and their application for transparent gas barrier film of FEP and HPIMS of IST will be introduced.