[21p-S223-1~17] 13.2 Exploratory Materials, Physical Properties, Devices

[21p-S223-3] Effects of Rapid Deposition on the Structure and Properties of BaSi₂ Evaporated Films

〇Kosuke Hara¹, Cham Thi Trinh², Yasuyoshi Kurokawa², Keisuke Arimoto¹, Junji Yamanaka¹, Kiyokazu Nakagawa¹, Takashi Suemasu³, Noritaka Usami² (1.Univ. Yamanashi, 2.Nagoya Univ., 3.Univ. Tsukuba)

Keywords:Barium silicide,Solar cell,Thermal evaporation

We have investigated the effects of deposition rate on carrier density and structure of BaSi₂ evaporated films. It has been found by Hall measurement that electron density decreases from 10¹⁹ cm⁻³ to 10¹⁷ cm⁻³ by increasing the deposition rate. At the same time, the full width of half maximum of the Raman scattering band decreases, suggesting that majority carrier, electron, in BaSi₂ evaporated films derives from crystal defects.