The 63rd JSAP Spring Meeting, 2016

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6 Thin Films and Surfaces » 6.1 Ferroelectric thin films

[21p-W641-1~19] 6.1 Ferroelectric thin films

Mon. Mar 21, 2016 1:45 PM - 7:00 PM W641 (W6)

Hironori Fujisawa(Univ. of Hyogo), Takeshi Yoshimura(Osaka Pref. Univ.), Shintaro Yasui(Titech)

3:45 PM - 4:00 PM

△ [21p-W641-8] Growth of orientation-contolled ferroelectric HfO2 thin films by solid phase crystallization and their characterization

〇Mimura Takanori1, Katayama Kiriha1, Shimizu Takao2, Uchida Hiroshi3, Kiguchi Takanori4, Akama Akihiro4, Konno Toyohiko4, Sakata Osami5, Funakubo Hiroshi1,2 (1.Tokyo Tech. IGS, 2.Tokyo Tech. MECS, 3.Sophia Univ. FST, 4.Tohoku Univ. IMR, 5.NIMS)

Keywords:ferroelectrics,HfO2