Electrical Characterization of SiO<sub>2</sub> / GaN Vertical MOS Capacitor treated by<br />High Pressure Water Vapor Annealing

Presentation information

Oral presentation

13 Semiconductors » 13.8 Compound and power electron devices and process technology

Tue. Mar 22, 2016 9:00 AM - 11:45 AM W541 (W5)

11:00 AM - 11:15 AM

〇Yuta Tominaga¹, Ueno Katsunori², Koji Yoshitsugu¹, Tada Yuki¹, Yasuaki Ishikawa¹, Yukiharu Uraoka¹ (1.NAIST, 2.Fuji Electric)

Keywords:GaN