1:15 PM - 1:30 PM
[22p-H103-2] Fabrication of Manganese Nitride Thin Films by Ultrahigh-Field Sputtering
Keywords:sputtering,nitride thin film,antiperovskite
Oral presentation
6 Thin Films and Surfaces » 6.4 Thin films and New materials
Tue. Mar 22, 2016 1:00 PM - 3:00 PM H103 (H)
Kentaro Shinoda(AIST)
1:15 PM - 1:30 PM
Keywords:sputtering,nitride thin film,antiperovskite