1:30 PM - 1:45 PM
[22p-H103-3] Development of galvano scanning pulsed laser deposition and high-speed deposition of binary composition thin film by alternate deposition of two targets
Keywords:pulsed laser deposition,Galvano mirror scanning
Oral presentation
6 Thin Films and Surfaces » 6.4 Thin films and New materials
Tue. Mar 22, 2016 1:00 PM - 3:00 PM H103 (H)
Kentaro Shinoda(AIST)
1:30 PM - 1:45 PM
Keywords:pulsed laser deposition,Galvano mirror scanning