Kazuma Ohki

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Speaker, Author, Co-Author

Thu. Sep 7, 2017 4:00 PM - 6:30 PM A413 (413)

Oral presentation
| 8 Plasma Electronics
| 8.1 Plasma production and control

[7p-A413-1~9] 8.1 Plasma production and control

4:15 PM - 4:30 PM

[7p-A413-2] Simulation of Non-Equilibrium Atmospheric Pressure He/H₂/CH₄ Plasmas for Carbon Thin Films Deposition

〇(M2)Kazuma Ohki¹, Akinori Oda¹, Takayuki Ohta², Hiroyuki Kousaka³ (1.Chiba inst. Technol., 2.Meijo Univ., 3.Gifu Univ.)