masaharu shimabayashi

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Speaker, Author, Co-Author

Thu. Sep 7, 2017 9:00 AM - 11:30 AM A413 (413)

Oral presentation
| 8 Plasma Electronics
| 8.1 Plasma production and control

[7a-A413-1~9] 8.1 Plasma production and control

11:15 AM - 11:30 AM

△ [7a-A413-9] Relationship between density of molecular nitrogen in the metastable A3Σu+ state and temperature of discharge tube in a remote nitrogen plasma source

〇masaharu shimabayashi¹, Kazuaki Kurihara², Koichi Sasaki¹ (1.Hokkaido Univ., 2.Toshiba/Imec)