Tomoko Ito

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Speaker, Author, Co-Author

Thu. Sep 7, 2017 9:00 AM - 11:45 AM A402 (402+403)

Oral presentation
| 8 Plasma Electronics
| 8.4 Plasma etching

[7a-A402-1~10] 8.4 Plasma etching

9:15 AM - 9:30 AM

△ [7a-A402-2] XPS Analyses for Adsorption Reactions of Hexafluoroacetylacetone (hfac) with Ni Surfaces

〇Tomoko Ito¹, Karahashi Kazuhiro¹, Hamaguchi Satoshi¹ (1.Osaka Univ.)