Xufang Zhang

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Speaker, Author, Co-Author

Tue. Sep 5, 2017 9:00 AM - 11:45 AM A203 (203)

Oral presentation
| 15 Crystal Engineering
| 15.6 Group IV Compound Semiconductors (SiC)

[5a-A203-1~10] 15.6 Group IV Compound Semiconductors (SiC)

10:00 AM - 10:15 AM

▲ [5a-A203-5] Verification of density distribution of near-interface traps in 4H-SiC MOS capacitors with different oxide thicknesses

〇(D)Xufang Zhang¹, Dai Okamoto¹, Tetsuo Hatakeyama², Mitsuru Sometani², Shinsuke Harada², Noriyuki Iwamuro¹, Hiroshi Yano¹ (1.Tsukuba Univ., 2.AIST)