Yoshihide Yamaguchi

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Speaker, Author, Co-Author

Tue. Sep 5, 2017 9:00 AM - 12:00 PM C11 (Office 1)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[5a-C11-1~11] 13.3 Insulator technology

6.1と13.3と13.5のコードシェアセッションあり

11:00 AM - 11:15 AM

[5a-C11-8] Thermal Dry Etching Method for Lanthanum Oxide by using Surface Modification with Organometallic Complex

〇Yoshihide Yamaguchi¹, Kazunori Shinoda¹, Yutaka Kouzuma², Satoshi Sakai², Masaru Izawa² (1.Hitachi. Ltd. R&D group, 2.Hitachi High-Technologies Corporation)

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