Kiyotaka Horikawa

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Speaker, Author, Co-Author

Tue. Sep 5, 2017 1:45 PM - 4:30 PM C11 (Office 1)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[5p-C11-1~10] 13.3 Insulator technology

6.1と13.3と13.5のコードシェアセッションあり

1:45 PM - 2:00 PM

△ [5p-C11-1] Improved bias stability atomic-layer-deposition Al₂O₃ films by crystallizing high-temperature annealing

〇(B)Kiyotaka Horikawa¹, Satoshi Okubo¹, Taisuke Kageura¹, Atsushi Hiraiwa^2,3,4, Hiroshi Kawarada^1,2,3 (1.Waseda Univ., 2.Zairean, 3.NTRC, 4.Nagoya Univ.)

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