Kazumasa Terada

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Speaker, Author, Co-Author

Tue. Sep 5, 2017 1:15 PM - 6:45 PM S41 (Conf. Room 1)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.2 Applications and technologies of electron beams

[5p-S41-1~20] 7.2 Applications and technologies of electron beams

3:30 PM - 3:45 PM

△ [5p-S41-9] Three-dimensional trajectory simulation of scattered electrons in scanning electron microscope specimen chamber

〇Kazumasa Terada¹, Yoshifumi Hagawara¹, Masatoshi Kotera¹ (1.Osaka Inst.)