Makoto Okada

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Speaker, Author, Co-Author

Tue. Sep 5, 2017 1:15 PM - 5:45 PM S42 (Conf. Room 2)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.3 Micro/Nano patterning and fabrication

[5p-S42-1~15] 7.3 Micro/Nano patterning and fabrication

4:00 PM - 4:15 PM

[5p-S42-10] Room-temperature nanoimprint for high-aspect pattern fabrication

〇Makoto Okada¹ (1.LASTI, Univ. of Hyogo)