The 78th JSAP Autumn Meeting, 2017

Presentation information

Print

Oral presentation

7 Beam Technology and Nanofabrication » 7.3 Micro/Nano patterning and fabrication

[5p-S42-1~15] 7.3 Micro/Nano patterning and fabrication

Tue. Sep 5, 2017 1:15 PM - 5:45 PM S42 (Conf. Room 2)

Toru Yamaguchi(NTT), Jiro Yamamoto(HITACHI), Jun Taniguchi(Tokyo Univ. of Sci.)

4:00 PM - 4:15 PM

[5p-S42-10] Room-temperature nanoimprint for high-aspect pattern fabrication

〇Makoto Okada1 (1.LASTI, Univ. of Hyogo)

Keywords:Nanoimprint

室温ナノンプリントによってハイアスペクトパターンの作製を試みた。