4:15 PM - 4:30 PM
[5p-S42-11] Computational study on induced strain in direct nanoimprint lithography
Keywords:nanoimprint lithography
Presentation information
Oral presentation
7 Beam Technology and Nanofabrication » 7.3 Micro/Nano patterning and fabrication
[5p-S42-1~15] 7.3 Micro/Nano patterning and fabrication
Tue. Sep 5, 2017 1:15 PM - 5:45 PM S42 (Conf. Room 2)
Toru Yamaguchi(NTT), Jiro Yamamoto(HITACHI), Jun Taniguchi(Tokyo Univ. of Sci.)