Kohei Goto

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Speaker, Author, Co-Author

Tue. Sep 5, 2017 1:15 PM - 5:45 PM S42 (Conf. Room 2)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.3 Micro/Nano patterning and fabrication

[5p-S42-1~15] 7.3 Micro/Nano patterning and fabrication

3:15 PM - 3:30 PM

△ [5p-S42-8] Fabrication of a biomimetic inspired 3D mold by using acceleration and dose modulation electron beam lithography

〇Kohei Goto¹, Taniguchi Jun¹ (1.TUS)