Iimin Rei

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Speaker, Author, Co-Author

Wed. Sep 6, 2017 9:00 AM - 12:15 PM A201 (201)

Oral presentation
| 15 Crystal Engineering
| 15.6 Group IV Compound Semiconductors (SiC)

[6a-A201-1~12] 15.6 Group IV Compound Semiconductors (SiC)

9:30 AM - 9:45 AM

[6a-A201-3] Electrical characteristics of W/SiO₂/nSiC-MOS capacitor with post metallization annealing

〇Iimin Rei¹, Takashi Kaneko¹, Hitoshi Wakabayashi¹, Kazuo Tsutsui², Hiroshi Iwai², Kuniyuki Kakushima¹, Masayuki Huruhashi³, Shingo Tomohisha³, Satoshi Yamakawa³ (1.Tokyo Tech.FRC, 2.Tokyo Tech. IIR, 3.Mitsubishi Electric Corp)