Toru Watanabe

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Speaker, Author, Co-Author

Wed. Sep 6, 2017 9:15 AM - 12:15 PM C21 (C21)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[6a-C21-1~12] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

10:00 AM - 10:15 AM

[6a-C21-4] Rate theory of SiC_xN_yO_zthin film formation at room temperature by PECVD

〇Toru Watanabe¹, Mai Hong Minh¹, Hitoshi Habuka¹ (1.Yokohama Nat. Univ.)