Hiroki Kamehama

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Speaker, Author, Co-Author

Wed. Sep 6, 2017 1:45 PM - 7:00 PM C21 (C21)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[6p-C21-1~20] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

4:30 PM - 4:45 PM

△ [6p-C21-11] Fabrication of SAW resonators on single-crystal diamonds using Minimal-Fab process

〇Hiroki Kamehama¹, Satoshi Fujii^1,2, Toonoe Haruki³ (1.N.I.T, Okinawa Coll., 2.Tokyo Tech, 3.Yokogawa Solution Serviece Corp.)