Oral presentation
13 Semiconductors » 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology
Wed. Sep 6, 2017 1:45 PM - 7:00 PM C21 (C21)
Kuniyuki Kakushima(Titech), Masato Sone(Titech)
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▲：英語発表
▼：奨励賞エントリーかつ英語発表
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1:45 PM - 2:00 PM
〇Kenta Irikura1, Watanabe Toru1 (1.Yokohama Nat. Univ.)
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2:00 PM - 2:15 PM
〇AYAMI YAMADA1, Hitoshi Habuka1 (1.Yokohama Nat. Univ.)
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2:15 PM - 2:30 PM
〇(M2)Norihisa Takei1, Hiroaki Kakiuchi1, Kiyoshi Yasutake1, Hiromasa Ohmi1 (1.Osaka Univ.)
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2:30 PM - 2:45 PM
〇Hiroyuki Tanaka1,2, Hisato Ogiso1,2, Shizuka Nakano1,2, Yoshiyuki Nozawa3, Toshihiro Hayami3, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.AIST, 2.MINIMAL, 3.SPPT)
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2:45 PM - 3:00 PM
Miya Matsuo1, 〇Mitsuko Muroi1, Ning Li1, Hitoshi Habuka1, Takanori Mikahara2,3, Shin-ichi Ikeda2,3, Yuuki Ishida2,3, Shiro Hara2,3 (1.Yokohama Nat. Univ., 2.MINIMAL, 3.AIST)
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3:00 PM - 3:15 PM
〇Takanori Mikahara1,2, Yuuki Ishida2, Takahiro Ito3, Noriko Miura1, Shinichi Ikeda2, Hitoshi Habuka4, Sommawan Khumpuang2, Shiro Hara2 (1.MINIMAL, 2.AIST, 3.ORIENTAL MOTOR Co, 4.Yokohama National Univ.)
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3:15 PM - 3:30 PM
〇Tetsuya Goto1, Kei-ichiro Sato2, Yuki Yabuta3, Shigetoshi Sugawa1, Shiro Hara4,5 (1.Tohoku Univ., 2.Kotec Co., LTD., 3.Seinan Industries Co., LTD., 4.AIST, 5.MINIMAL)
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3:30 PM - 3:45 PM
〇kazushige sato1,3, Takashi Chiba1,3, Masao Terada1,3, Shinichi Ikeda1,2, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.Minimal Fab General Incorporated Association, 2.AIST, 3.Sakaguchi E.H VOC Corp)
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3:45 PM - 4:00 PM
〇Kazuhiro Koga1,2, Fumito Imura1,2, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.AIST, 2.MINIMAL)
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4:00 PM - 4:15 PM
〇Noriko Miura1,2, Takeshi Aizawa2, Fumito Imura1,3, Takeshi Yamada2, Mitsunori Nogawa2, Yasuhiro Onishi2, Tatsuo Ishijima4, Hiroaki Suzuki4, Taishin Shimada4, Sommawan Khumpuang1,3, Shiro Hara1,3 (1.MINIMAL, 2.YONEKURA, 3.AIST, 4.KANAZAWA UNIVERSITY)
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4:30 PM - 4:45 PM
〇Hiroki Kamehama1, Satoshi Fujii1,2, Toonoe Haruki3 (1.N.I.T, Okinawa Coll., 2.Tokyo Tech, 3.Yokogawa Solution Serviece Corp.)
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4:45 PM - 5:00 PM
〇Sommawan Khumpuang1,2, Norio Umeyama1,2, Hiroyuki Tanaka1,2, Shiro Hara1,2 (1.AIST, 2.MINIMAL)
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5:00 PM - 5:15 PM
〇AnhTuan Phan1,2, Hiroyuki Tanaka1,3, Norio Umeyama1,3, Noriko Miura1,3, Khumpuang Sommawan1,3, Shiro Hara1,3 (1.Minimal Fab, 2.SHTPLabs, 3.AIST)
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5:15 PM - 5:30 PM
〇Yongxun Liu1, Hiroyuki Tanaka1, Norio Umeyama1, Sommawan Khumpuang1, Masayoshi Nagao1, Takashi Matsukawa1, Shiro Hara1 (1.AIST)
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5:30 PM - 5:45 PM
〇Norio Umeyama1,2, Noriko Miura2, Fumito Imura1,2, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.AIST, 2.MINIMAL)
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5:45 PM - 6:00 PM
〇Masao Yoshioka1, Yosuke Tanaka1, Ryoichi Irita1, Shinya Yoshida1, Norio Umeyama2,3, Sommawan Khumpuang2,3, Shiro Hara2,3 (1.PMT, 2.AIST, 3.MINIMAL)
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6:00 PM - 6:15 PM
〇Norio Umeyama1,2, Takaaki Sakai3, Atsushi Kajikura3, Kouichiro Ichikawa3, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.AIST, 2.MINIMAL, 3.Fujikoshi Machinery)
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6:15 PM - 6:30 PM
〇Fumito Imura1,2, Michihiro Inoue1, Arami Saruwatari1, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.AIST, 2.MINIMAL)
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6:30 PM - 6:45 PM
〇Takashi Yajima1, Masaharu Yasui1, Sommawan Khumpuang1, Hitoshi Maekawa1, Shiro Hara1 (1.AIST)
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6:45 PM - 7:00 PM
〇Akira Ishibashi1,5,6, Junji Matsuda2, Nobutoshi Noguchi3, Tsukio Etoh4, Yoshihisa Ohashi5, Shiro Hara6 (1.RIES, Hokkaido Univ., 2.Hiei Kensetsu, 3.Ishibashi Arch. Assc, 4.Kindai Setsubi Skkei, 5.CsTEC Corp., 6.AIST)
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