Takanori Mikahara

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Speaker, Author, Co-Author

Wed. Sep 6, 2017 1:45 PM - 7:00 PM C21 (C21)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[6p-C21-1~20] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

3:00 PM - 3:15 PM

[6p-C21-6] Effect of the internal structure on the Minimal Si-CVD tool

〇Takanori Mikahara^1,2, Yuuki Ishida², Takahiro Ito³, Noriko Miura¹, Shinichi Ikeda², Hitoshi Habuka⁴, Sommawan Khumpuang², Shiro Hara² (1.MINIMAL, 2.AIST, 3.ORIENTAL MOTOR Co, 4.Yokohama National Univ.)

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