The 78th JSAP Autumn Meeting, 2017

Kuniyuki Kakushima

Chairperson, etc.

Wed. Sep 6, 2017 1:45 PM - 7:00 PM C21 (C21)

  • Oral presentation
  • | 13 Semiconductors
  • | 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

Kuniyuki Kakushima(Titech), Masato Sone(Titech)