Masao Yoshioka

→ Search for Masao Yoshioka in Google Scholar

Speaker, Author, Co-Author

Wed. Sep 6, 2017 1:45 PM - 7:00 PM C21 (C21)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[6p-C21-1~20] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

5:45 PM - 6:00 PM

[6p-C21-16] Development of minimal maskless exposure with backside alignment function

〇Masao Yoshioka¹, Yosuke Tanaka¹, Ryoichi Irita¹, Shinya Yoshida¹, Norio Umeyama^2,3, Sommawan Khumpuang^2,3, Shiro Hara^2,3 (1.PMT, 2.AIST, 3.MINIMAL)

▲