AYAMI YAMADA

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Speaker, Author, Co-Author

Wed. Sep 6, 2017 1:45 PM - 7:00 PM C21 (C21)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[6p-C21-1~20] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

2:00 PM - 2:15 PM

[6p-C21-2] Method for Increasing the Growth Rate of Silicon Film in SiH₂Cl₂-SiH_x-H₂ System

〇AYAMI YAMADA¹, Hitoshi Habuka¹ (1.Yokohama Nat. Univ.)