AnhTuan Phan

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Speaker, Author, Co-Author

Wed. Sep 6, 2017 1:45 PM - 7:00 PM C21 (C21)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[6p-C21-1~20] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

5:00 PM - 5:15 PM

[6p-C21-13] MEMS Piezo-resistive Accelerometer Fabricated by Full Minimal Fab Process

〇AnhTuan Phan^1,2, Hiroyuki Tanaka^1,3, Norio Umeyama^1,3, Noriko Miura^1,3, Khumpuang Sommawan^1,3, Shiro Hara^1,3 (1.Minimal Fab, 2.SHTPLabs, 3.AIST)

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