Satoru Matsumoto

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Speaker, Author, Co-Author

Wed. Sep 6, 2017 4:00 PM - 6:00 PM PA8 (P)

Poster presentation
| 13 Semiconductors
| 13.8 Compound and power electron devices and process technology

[6p-PA8-1~31] 13.8 Compound and power electron devices and process technology

4:00 PM - 6:00 PM

[6p-PA8-26] Low-damage etching of n-GaN surface utilizing photoelectrochemical reactions

〇Satoru Matsumoto¹, Taketomo Sato¹, Tetsuo Narita^2,3, Tetsu Kachi³, Tamotsu Hashizume^1,3 (1.RCIQE, Hokkaido Univ., 2.Toyota Central R&D Labs.,Inc., 3.IMaSS, Nagoya Univ.)

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