Ken Iyoda

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Speaker, Author, Co-Author

Wed. Sep 6, 2017 4:00 PM - 6:00 PM PA8 (P)

Poster presentation
| 13 Semiconductors
| 13.8 Compound and power electron devices and process technology

[6p-PA8-1~31] 13.8 Compound and power electron devices and process technology

4:00 PM - 6:00 PM

[6p-PA8-27] Annealing of hydrogen-ion-implanted n-GaN under reverse bias

〇Ken Iyoda¹, Yutaka Tokuda¹, Kenji Shiojima², Joji Ito³, Takahide Yagi³ (1.Aichi Inst.ofTech., 2.Fukui Univ., 3.SHI-ATEX Co,Ltd.)