Makoto Baba

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Speaker, Author, Co-Author

Wed. Sep 6, 2017 4:00 PM - 6:00 PM PA8 (P)

Poster presentation
| 13 Semiconductors
| 13.8 Compound and power electron devices and process technology

[6p-PA8-1~31] 13.8 Compound and power electron devices and process technology

4:00 PM - 6:00 PM

[6p-PA8-28] Deposition and characterization of silicon dioxide film formed by surface-wave plasma enhanced chemical vapor deposition (2)

〇Makoto Baba¹, Kento Nakamura¹, Okada Hiroshi^2,1, Furukawa Masakazu³, Yamane Keisuke¹, Sekiguchi Hiroto¹, Wakahara Akihiro^1,2 (1.Toyohashi Univ.Tech, 2.EIIRIS, 3.ARLC)

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