HU LI

Speaker, Author, Co-Author

Thu. Sep 7, 2017 9:00 AM - 11:45 AM A402 (402+403)

Oral presentation
| 8 Plasma Electronics
| 8.4 Plasma etching

[7a-A402-1~10] 8.4 Plasma etching

9:30 AM - 9:45 AM

△ [7a-A402-3] Analysis of Etching Mechanisms on of ZnO pretreated by He⁺ Ion Irradiation

〇HU LI¹, Tomoko Ito¹, Kazuhiro Karahashi¹, Masanaga Fukasawa², Akiko Hirata², Nagahata Kazunori², Tetsuya Tatsumi², Satoshi Hamaguchi¹ (1.Osaka Univ., 2.Sony)

▲

HU LI

Speaker, Author, Co-Author

[7a-A402-1~10] 8.4 Plasma etching

△ [7a-A402-3] Analysis of Etching Mechanisms on of ZnO pretreated by He+ Ion Irradiation

△ [7a-A402-3] Analysis of Etching Mechanisms on of ZnO pretreated by He⁺ Ion Irradiation