Thuy Thi Nguyen

→ Search for Thuy Thi Nguyen in Google Scholar

Speaker, Author, Co-Author

Thu. Sep 7, 2017 9:00 AM - 12:30 PM C21 (C21)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[7a-C21-1~13] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

12:00 PM - 12:15 PM

▲ [7a-C21-12] Characterization of (100) Surface Oriented Poly-Si Thin Films with Multi-Line Beam Continuous-Wave Laser Lateral Crystallization

〇(DC)Thuy Thi Nguyen¹, Mitsuhisa Hiraiwa¹, Tomoyuki Koganezawa², Satoshi Yasuno², Shin-Ichiro Kuroki¹ (1.Hiroshima Univ., 2.SPring-8)